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Current position:Home > News Application of voice coil motor in mask stage system of lithography machine

Application of voice coil motor in mask stage system of lithography machine

time:2020-6-13  click:3124

     Application of voice coil motor in mask stage system of lithography machine. As one of the core equipment of chip manufacturing, lithography machine has a decisive influence on the chip manufacturing process. 

     It is reported that according to the use of lithography can be divided into the production of chip lithography, packaging chip lithography and used for LED manufacturing field of projection lithography. High End Lithography, which produces chips, is China's big short in semiconductor equipment manufacturing. 

     Chip makers are further divided into High End lithography and Medium and low End lithography. Although the High End lithography is monopolized by asml of the Netherlands, the technology of Medium and low End lithography in China is more mature, and it's breaking through to the High End lithography machine. 

     Take Shanghai Microelectronics Equipment Co. , Ltd. . In recent years, it has launched the IC front-line manufacturing photolithograph SSX600 series photolithograph, IC back-line advanced packaging SSB500 series photolithograph, LED manufacturing SSB300 series photolithograph, TFT exposure SSB200 series photolithograph. 

     Focus, Shanghai Microelectronics Equipment Co. , Ltd. is our partner with Mao, we have purchased high-performance Voice Coil Motor from our company for use in products, what is the specific role of voice coil motor in lithographic machine? The voice coil motor is mainly used in the mask stage system of the photolithography machine. In this system, the motion of the voice coil motor is divided into scanning motion and positioning motion, the motion has a very high demand for positioning accuracy and speed stability, and pursues the time optimization on the basis of stability. The voice coil motor system has a low damping ratio, which is an important requirement of the lithography machine. 

音圈电机

     Kunshan has been in the field of voice coil motor for more than 10 years, and has always been customer-oriented, using European and American technical standards and processing technology, specializing in customized voice coil motor reasonable performance. 

     The article was originally written by www.islam4africa.net of Tongmao Electronics Co. , Ltd. in Kunshan, China.

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